SCALE = 1.40000000000000E+00 / grating misalignment scale factor DXOFFS = 0.00000000000000E+00 / [mm] offset of RFC defocus RGA_HEW = 7.77777800000000E-04 / [deg] Grating mis-alignment HEW ALGOID = 1 / argorithm identifyer
ALGOID = 1 / argorithm identifyer